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Vacuum components

The vacuum components include dry vacuum pumps, valves, and flanges.


Manufactured with advanced production processes, these components are widely used in industries such as physical and chemical materials science, lithium batteries, solar cells, pharmaceuticals, and more.

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VDP10 Dry Vacuum Pump
Angle Valve
Gate Valve
Ultra-High Vacuum Gate Valve
ISO Flange
CF Flange
ANSI ASA Vacuum Flanges
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VDP10 Dry Vacuum Pump

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  • Features:
    100% oil-free dry scroll pump, no backflow or oil spraying, with extensive applications.
  • Advantages:
  • Frequency Control Ensuring continuous optimal operation
  • Build-in One-way Check Valve, Low leakage and safe operation
  • Filtration Unit, For multi-environment needs
  • Motor and Vacuum System Integration, more compact, lightweight and efficient.
  • Gas Ballast Valve, for high steam environment
  • Low vibration, low noise, low power consumption, compact and lightweight
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VDP10 Dry Vacuum Pump
VDP10 Dry Vacuum Pump

VDP10 Dry Vacuum Pump
VDP10 Dry Vacuum Pump
VDP10 Dry Vacuum Pump

VDP10 Dry Vacuum Pump

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Angle Valve

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  • Built on a reliable and robust core design, the pneumatic angle valve offers a wide range of design options.
  • Available in DN25, DN40, and DN50 to accommodate diverse application needs.
  • The valve can be operated via solenoid valves either mounted directly on the device or from remote locations.
  • Usable under varying temperature conditions depending on the selected sealing elastomer.
  • Configurable as normally open, normally closed, or double-acting to suit specific requirements.
  • In addition to standard options, further customization is available to meet specialized demands.
image DN25 Specifications image image DN40 Specifications image image DN50 Specifications image
Angle Valve
Angle Valve

Angle Valve

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Gate Valve

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Gate Valve / Slide Valve

  • Ideal for applications requiring strict control of leakage.
  • Primarily consists of a valve body, gate plate, guide rail cylinder, and O-ring seal etc.
  • The gate plate moves vertically along the centerline of the valve seat, enabling simple and direct opening and closing actions.
  • The sealing contact surface between the gate plate and valve seat is linear. Combined with O-ring seals and precision machining, the valve achieves an exceptional level of sealing.
Gate Valve
Gate Valve

Gate Valve

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Ultra-High Vacuum Gate Valve

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Operating Environment: Suitable for use in air, inert gas, and vacuum conditions.
The ultra-high vacuum gate valve is composed of three main components: the actuator, the valve, and the valve body. The connection ports are compatible with KF, ISO, ANSI, and CF flanges.

  • Features:
    1）Reliable and Mature Design
    2）Lubricant-Free, can be heated to a maximum temperature of 250°C.
    3）Metal Valve Cap Sealing.
    4）Automatic Fail-Safe Function
    5）Stainless Steel Valve Body
    6）The feed-through mechanism is sealed with welded metal bellows.
  • Applications:
  • Vacuum exhaust systems
  • Pumping systems for ultra-high vacuum applications
  • Semiconductor technology
  • Synchrotron radiation facilities
  • Academic research systems
Ultra-High Vacuum Gate Valve
Ultra-High Vacuum Gate Valve

Ultra-High Vacuum Gate Valve

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ISO Flange

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  • Applicable Temperature: -150°C to 80°C
  • ISO Flange Subcategories:
  • End Cap
  • Through-Hole End Cap
  • Through-Hole Flange: Non-threaded holes and Threaded holes
  • Rotatable Bolt Ring
  • Butt-Weld Flange
  • Clamp Ring
  • Clamps: Single-Sided Clamp and Double-Sided Clamp
  • Plastic Protective Cap
ISO Flange
ISO Flange

ISO Flange

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CF Flange

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  • Applicable temperature: -200°C to 450°C
  • Material:304 S.S., 316 S.S., 316LN ESR
  • Gasket:Oxygen-Free Copper
  • Vacuum Level:-10⁻¹³ mbar
  • Plastic protective cover: PTFE (Polytetrafluoroethylene)
CF Flange
CF Flange

CF Flange

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ANSI ASA Vacuum Flanges

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  • 304 stainless steel vacuum flanges with bolt fastening for easy assembly and disassembly.
  • The ANSI ASA vacuum flange series includes both blind flanges and O-ring groove flanges, available in a comprehensive range of accessory in sizes from 1" to 12".
  • Blind flanges, with no central hole, serve as end caps for vacuum piping systems. O-ring groove flanges, designed for pipe-to-pipe connections, are secured with bolts, ensuring convenient disassembly and reassembly.
ANSI ASA Vacuum Flanges
ANSI ASA Vacuum Flanges

ANSI ASA Vacuum Flanges

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